Substrate processing unit, method of detecting end point of...

Details Substrate processing unit, method of detecting end point of... Substrate processing unit, method of detecting end point of...

2003-08-28

2011-12-13

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Processes

Combined

C216S059000

Reexamination Certificate

active

08075698

ABSTRACT:
A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.

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