Substrate processing method and substrate processing system

Details Substrate processing method and substrate processing system Substrate processing method and substrate processing system

2007-02-20

2007-02-20

Jolley, Kirsten (Department: 1762)

Coating processes

Centrifugal force utilized

C427S348000, C427S350000, C427S374100, C427S377000, C118S050000, C118S050100, C118S052000, C438S758000

Reexamination Certificate

active

10964684

ABSTRACT:
The present invention relates to a processing method for processing a substrate, and comprises a step of coating a coating solution on a surface of the substrate while relatively moving a coating solution discharge nozzle and the substrate and discharging the coating solution from the nozzle onto the substrate. Thereafter, the substrate is exposed to a solvent atmosphere of the coating solution or the pressure is temporarily applied thereto in a container. Thereafter, the pressure inside the container in which the substrate is housed is reduced to dry the coating solution on the substrate. According to the present invention, it is possible to narrow the so-called edge cutting width, which is at a periphery part of the substrate and is not commercialized, and to maintain an in-plane uniformity of the coating film.

REFERENCES:
patent: 5658615 (1997-08-01), Hasebe et al.
patent: 6413317 (2002-07-01), Miyazaki et al.
patent: 6447608 (2002-09-01), Sakai et al.
patent: 6530340 (2003-03-01), You et al.
patent: 6599366 (2003-07-01), Kitano et al.
patent: 6676757 (2004-01-01), Kitano et al.
patent: 200185416 (2001-03-01), None
English Computer Translation of JP200185416 by Miyazaki et al., Sep. 14, 1999.

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