Substrate processing apparatus, parameter management system...

Details Substrate processing apparatus, parameter management system... Substrate processing apparatus, parameter management system...

2007-01-05

2010-11-02

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

Reexamination Certificate

active

07824934

ABSTRACT:
A substrate processing apparatus which enables parameters for carrying out processing on substrates to be changed easily by a user. A storage device stores parameters that are for controlling the processing and are categorized into a plurality of categories. A control device carries out the processing on the substrate based on the parameters. A parameter changing device enables each of the parameters to be changed in accordance with the category of that parameter. A parameter category changing device changes the category of some of the parameters. A category change defining device is detachable from the substrate processing apparatus and specifies parameters whose category is to be changed out of the parameters. The parameter category changing device changes the category of each of the parameters specified by the category change defining device.

REFERENCES:
patent: 2005/0246127 (2005-11-01), Renken et al.
patent: 2006/0134330 (2006-06-01), Ishikawa et al.
patent: 10-125587 (1998-05-01), None
patent: 2000-228348 (2000-08-01), None

Affiliated with

Also associated with

Rating

Substrate processing apparatus, parameter management system... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing apparatus, parameter management system..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing apparatus, parameter management system... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4180498