Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2005-07-05
2005-07-05
Tran, Khoi H (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S259000, C414S939000, C414S941000, C901S047000
Reexamination Certificate
active
06915183
ABSTRACT:
The present invention has a first optical detection mark having a predetermined positional coordinate in a lateral direction with respect to a carrier opening of a processing unit through which a carrier apparatus enters and exits, a second optical detection mark having a predetermined positional coordinate in a vertical direction with respect to the carrier opening, and an optical sensor provided on the substrate carrier apparatus for detecting the first or second optical detection mark. The substrate carrier apparatus is rotated by a predetermined angle from a position of the substrate carrier apparatus where the optical sensor detects the first optical detection mark, and the substrate carrier apparatus is moved in the vertical direction by a predetermined amount of movement from a position of the substrate carrier apparatus where the optical sensor detects the second optical detection mark. After the substrate carrier apparatus faces the carrier opening of the processing unit, the substrate carrier apparatus is allowed to enter the processing unit to acquire in advance a precise transfer position when transferring a substrate to a predetermined position on a mounting table in the processing unit.
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Iida Naruaki
Ito Kazuhiko
Kinoshita Michio
Rader & Fishman & Grauer, PLLC
Tran Khoi H
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