Substrate preparation using megasonic coupling fluid...

Details Substrate preparation using megasonic coupling fluid... Substrate preparation using megasonic coupling fluid...

2005-09-30

2010-10-12

Barr, Michael (Department: 1711)

Cleaning and liquid contact with solids

Apparatus

With means for collecting escaping material

C134S059000, C134S105000, C134S172000, C134S902000

Reexamination Certificate

active

07810513

ABSTRACT:
An apparatus for preparing a substrate is provided. The apparatus includes a proximity head and a megasonic proximity head. The proximity head is configured to be applied to a substrate frontside and is capable of generating a preparation meniscus on the substrate frontside. The preparation meniscus includes a preparation chemistry that is configured to remove a material defined on the substrate frontside. The megasonic proximity head is configured to be applied to a substrate backside, and is capable of generating a coupling meniscus on the substrate backside. The megasonic proximity head is further capable of imparting megasonic energy to the coupling meniscus. The megasonic energy imparted to the coupling meniscus is configured to enhance a mass transport of the preparation chemistry through a material to be removed on the substrate frontside.

REFERENCES:
patent: 6222305 (2001-04-01), Beck et al.
patent: 6230722 (2001-05-01), Mitsumori et al.
patent: 2002/0096578 (2002-07-01), Al-Jiboory
patent: 2004/0069319 (2004-04-01), Boyd et al.

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