Abrading – Abrading process – With tool treating or forming
Patent
1999-05-10
2000-04-25
Rose, Robert A.
Abrading
Abrading process
With tool treating or forming
451444, B24B 5512
Patent
active
060538015
ABSTRACT:
Systems and methods for polishing a substrate with reduced contamination are described. A rinse arm has one or more nozzles configured to direct rinse fluid toward a polishing surface for polishing a substrate. The rinse arm further includes a fluid dispenser configured to direct rinse fluid to one or more surfaces of the rinse arm in proximity to the polishing surface and exposed to airborne slurry particles generated from slurry on the polishing surface. By maintaining the atmosphere in the vicinity of the exposed rinse arm surfaces at an elevated relative humidity level, airborne slurry particles adhering to the exposed rinse arm surfaces remain in suspension and, therefore, may be easily cleaned, e.g., during a high pressure rinse cycle. This feature reduces the likelihood that slurry particles will accumulate on exposed surfaces of the polishing apparatus and flake off while a substrate is being polished, reducing the likelihood of substrate defects caused by such slurry contamination.
REFERENCES:
patent: 5421768 (1995-06-01), Fujiwara et al.
patent: 5578529 (1996-11-01), Mullins
patent: 5616069 (1997-04-01), Walker et al.
patent: 5702563 (1997-12-01), Salugsugan et al.
patent: 5779522 (1998-07-01), Walker et al.
Groechel David W.
Pinson Jay D.
Shah Nitin
Waidl Joe
Applied Materials Inc.
Rose Robert A.
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