Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1989-02-24
1992-03-03
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414225, 414416, 414331, 4147442, 118719, 20429825, 901 40, F16K 116
Patent
active
050927280
ABSTRACT:
Each substrate is loaded into a receiving chamber upon a positionable platform, which platform is in sealed relationship with the receiving chamber to permit purging of the receiving chamber prior to transport of the loaded substrate(s) to a feed chamber. The platform is positioned from the receiving chamber into the feed chamber wherefrom the substrates are off loaded. A cassette containing a plurality of stacked substrates may be loaded upon the platform to transport a plurality of substrates into the feed chamber.
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Crabb Richard
deBoer Wiebe B.
Ferro Armand P.
Goodwin Dennis L.
Hawkins Mark R.
Epsilon Technology Inc.
Werner Frank E.
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