Substrate inspection apparatus, substrate inspection method,...

Details Substrate inspection apparatus, substrate inspection method,... Substrate inspection apparatus, substrate inspection method,...

2006-07-25

2006-07-25

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

C324S525000, C324S765010

Reexamination Certificate

active

07081756

ABSTRACT:
A substrate inspection apparatus includes a first waveform measurer which acquires a first amplitude waveform that is the amplitude waveform of an AC voltage obtained from a semiconductor of a semiconductor substrate which is being inspected when an external AC power source is connected to the semiconductor and an AC voltage from the AC power source is applied to the semiconductor, the semiconductor substrate also having an interconnection that is supposed to be connected to the semiconductor; a second waveform measurer which is connectable to the interconnection of the semiconductor substrate and acquires a second amplitude waveform that is the amplitude waveform of a voltage in the interconnection when the AC voltage is applied to the semiconductor; and an evaluator which calculates the phase difference between the first amplitude waveform and the second amplitude waveform and extracts information on a defect of the semiconductor substrate on the basis of the thus-calculated phase difference.

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Yamazaki et al., “Voltage Contrast Defect Inspection of Contacts and Vias for Deep Quarter Micron Devices,” Jpn. J. Appl. Phys. (Dec. 1999), 38:7168-72.

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