Substrate holding unit, exposure apparatus, and device...

Details Substrate holding unit, exposure apparatus, and device... Substrate holding unit, exposure apparatus, and device...

2005-04-05

2005-04-05

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110, C250S492200

Reexamination Certificate

active

06875987

ABSTRACT:
On an upper surface of a main body configuring a holder main body, a plurality of pins and a rim portion which upper end surface is set at almost the same height with a surface formed by the tip portions of the pins are provided. In addition, the main body has a honeycomb structure. Also, through holes formed in the honeycomb core are arranged corresponding to the arrangement of the plurality of pins. And, by a vacuum chucking mechanism, a wafer is vacuum chucked with respect to the tip portions of the plurality of pins and the upper end surface of the rim portion. In addition, among the plurality of pins arranged, the pins arranged closed to the rim portion are spaced more densely than the pins arranged elsewhere on the main body.

REFERENCES:
patent: 6614504 (2003-09-01), Aoki et al.
patent: 8-31514 (1996-03-01), None
patent: 3000361 (2000-01-01), None

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