Abrading – Work holder – Vacuum
Reexamination Certificate
2006-04-25
2006-04-25
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Work holder
Vacuum
C451S389000
Reexamination Certificate
active
07033260
ABSTRACT:
The present invention relates to a substrate holding apparatus for holding a substrate such as a semiconductor wafer in a polishing apparatus for polishing the substrate to a flat finish. The substrate holding apparatus according to the present invention comprises a top ring body having a receiving space therein, and a vertically movable member which is vertically movable within the receiving space in the top ring body. An abutment member having an elastic membrane is attached to a lower surface of the vertically movable member. The elastic membrane of the abutment member comprises an abutment portion, having a flange projecting outwardly, brought into direct or indirect contact with the substrate, and a connecting portion extending upwardly from a base portion of the flange of the abutment portion and being connected to the vertically movable member. The connecting portion is made of a material having a flexibility higher than that of material of the abutment portion.
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Fukushima Makoto
Ichimura Teruhiko
Nabeya Osamu
Sakurai Kunihiko
Togawa Tetsuji
Ebara Corporation
Wenderoth , Lind & Ponack, L.L.P.
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