Substrate holding and spinning assembly and methods for...

Chucks or sockets – Pivoted jaw

Reexamination Certificate

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Details

C118S503000, C118S730000, C134S149000, C134S153000, C134S902000

Reexamination Certificate

active

10611227

ABSTRACT:
A substrate holding apparatus is provided. The substrate holding apparatus includes a chuck yoke, a plurality of arm assemblies, and a plurality of gripper assemblies. A first end of each of the arm assemblies is connected to the chuck yoke and each of the arm assemblies has a spring. A second end of each of the arm assemblies is connected to a respective one of the plurality of grippers. The chuck yoke is capable of rotating so as to move each of the plurality of arm assemblies and respective plurality of gripper assemblies into either a closed position or an open position. A compression force from each of the springs is applied to a substrate when the grippers are moved to the closed position.

REFERENCES:
patent: 2207621 (1940-07-01), Hite
patent: 2667356 (1954-01-01), Foward
patent: 3933347 (1976-01-01), Stoffels
patent: 5421056 (1995-06-01), Tateyama et al.
patent: 6578853 (2003-06-01), Treur et al.
patent: 6761362 (2004-07-01), Noguchi
patent: 6827092 (2004-12-01), Smith et al.
patent: 6916026 (2005-07-01), Meza
patent: 7087122 (2006-08-01), Smith et al.

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