Substrate holder for wafers during MBE growth

Details Substrate holder for wafers during MBE growth Substrate holder for wafers during MBE growth

1988-11-07

1989-10-31

Hoag, Willard

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118728, 118503, H01L 2105, H01L 2184, C30B 2508, C30B 2306

Patent

active

048775738

ABSTRACT:
A holder for supporting a compound semiconductor wafer such as GaAs during MBE heating includes a molybdenum ring, a tantalum ring for supporting the wafer therebetween uniformly about its outer edge, and a sapphire wafer, opposite the compound semiconductor wafer, fixedly attached to the molybdenum ring. The sapphire wafer prevents arsenic loss during heating and transmits infrared radiation to reach the compound semiconductor wafer.

REFERENCES:
patent: 3507248 (1970-04-01), Seeley et al.
patent: 3589936 (1971-06-01), Tramposch
patent: 4492852 (1985-01-01), Finegan et al.
patent: 4592307 (1986-06-01), Jolly
patent: 4699083 (1987-10-01), Huet et al.
patent: 4806321 (1989-02-01), Nishizawa et al.

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