Substrate heater assembly

Details Substrate heater assembly Substrate heater assembly

2006-04-04

2006-04-04

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S416000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100, C118S728000, C118S729000, C118S732000

Reexamination Certificate

active

07024105

ABSTRACT:
A substrate heater assembly for supporting a substrate of a predetermined standardized diameter during processing is provided. In one embodiment, the substrate heater assembly includes a body having an upper surface, a lower surface and an embedded heating element. A substrate support surface is formed in the upper surface of the body and defines a portion of a substrate receiving pocket. An annular wall is oriented perpendicular to the upper surface and has a length of at least one half a thickness of the substrate. The wall bounds an outer perimeter of the substrate receiving pocket and has a diameter less than about 0.5 mm greater than the predetermined substrate diameter.

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