Substrate for recording head, recording head and method for prod

Details Substrate for recording head, recording head and method for prod Substrate for recording head, recording head and method for prod

1992-04-20

1994-12-27

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 1566591, 3461401, H01L 21306, B44C 122, C23F 100

Patent

active

053762312

ABSTRACT:
A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member by photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.

REFERENCES:
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patent: 4429321 (1984-01-01), Matsumoto
patent: 4459600 (1984-07-01), Sato et al.
patent: 4463359 (1984-07-01), Ayata et al.
patent: 4558333 (1985-12-01), Sugitani et al.
patent: 4723129 (1988-02-01), Endo et al.
patent: 4740796 (1988-04-01), Endo et al.
patent: 4957592 (1990-09-01), O'Neill
patent: 4968992 (1990-11-01), Komuro
patent: 5007984 (1991-04-01), Tsutsumi et al.
Journal of the Electrochemical Society, White, "Bilayer Taper Etching of Field Oxides and Passivation Layers" vol. 127, No. 12, pp. 2687-2693, Dec. 1980.

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