Substrate detector with light emitting and receiving elements ar

Details Substrate detector with light emitting and receiving elements ar Substrate detector with light emitting and receiving elements ar

1993-08-12

1994-06-07

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

414938, G01V 904

Patent

active

053192168

ABSTRACT:
A substrate detector device comprises a boat or chuck for holding substrates, a light emitting section having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates, a light receiving section, facing the light emitting section and having a plurality of light receiving elements, for receiving light beams passed through the substrates, the light receiving elements arranged side by side so as not face the light emitting elements, a polarization filter provided on optical axes of the respective optical beams incident on the light receiving elements, a memory for storing, as reference data, an amount of light received by a receiving element which has been measured in advance when a light beam is applied to a substrate in a state where no other substrate is present on either side of the substrate, and controller for discriminating the presence, the number, and the state of arrangement of the substrates on the holding means based on the reference data and measured data based on the amount of light received by the light receiving elements after a light beam scattered by the substrate to be detected and a light beam wraparound substrates adjacent thereto are removed by the polarization filter.

REFERENCES:
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5189481 (1993-02-01), Jann et al.

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