Substrate conveying module and system made up of substrate...

Details Substrate conveying module and system made up of substrate... Substrate conveying module and system made up of substrate...

2005-11-08

2005-11-08

Brahan, Thomas J. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S217100

Reexamination Certificate

active

06962471

ABSTRACT:
The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).

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