Substrate cassette

Details Substrate cassette Substrate cassette

1998-01-20

1999-04-06

Sewell, Paul T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206454, 206711, 206707, B65D 8530

Patent

active

058905987

ABSTRACT:
A substrate cassette with a receiving frame having support plates formed integrally therewith. The support plates minimize the deformation of substrates loaded in the cassette and ascribable to their own weights. Hemispherical lugs are formed on each support plate in order to protect the rear of the substrates from scratches.

REFERENCES:
patent: 3682083 (1972-08-01), Puente
patent: 4153164 (1979-05-01), Hofmeister et al.
patent: 4155447 (1979-05-01), Edwards
patent: 4724963 (1988-02-01), Mortensen
patent: 4815601 (1989-03-01), Peterson et al.
patent: 4872554 (1989-10-01), Quernemoen
patent: 4930634 (1990-06-01), Williams et al.
patent: 5377825 (1995-01-01), Sykes et al.
patent: 5492229 (1996-02-01), Tanaka et al.
patent: 5558220 (1996-09-01), Gartz
patent: 5584401 (1996-12-01), Yoshida
patent: 5638958 (1997-06-01), Sanchez

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