Conveyors: fluid current – Having means for maintaining load in suspension along flow path – By load supporting jets
Reexamination Certificate
2011-08-09
2011-08-09
Dillon, Jr., Joe (Department: 3651)
Conveyors: fluid current
Having means for maintaining load in suspension along flow path
By load supporting jets
C414S676000
Reexamination Certificate
active
07993081
ABSTRACT:
A device capable of causing a substrate to float by a gas can suppress the consumption of a gas. The device includes a carrying passage along which a substrate is carried. The gas spouted through the gas spouting pores causes the substrate to float and creates gas flows in the carrying gas flow grooves to propel the substrate in a carrying direction. The carrying passage is divided with respect to the carrying direction into passage sections, and the spouting of the gas through groups of the gas spouting pores assigned respectively to the passage sections is controlled to suporess the consumption of the gas.
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Korean Office Action issued on Jan. 10, 2011 in corresponding Korean Application No. 10-2007-0001318 (with an English translation).
Dillon, Jr. Joe
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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