Substrate carrier having door latching and substrate...

Details Substrate carrier having door latching and substrate... Substrate carrier having door latching and substrate...

2007-11-27

2007-11-27

Douglas, Steven O. (Department: 3771)

Fluent material handling, with receiver or receiver coacting mea

Combined

C141S093000, C414S217000, C414S331090, C414S940000

Reexamination Certificate

active

11210199

ABSTRACT:
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.

REFERENCES:
patent: 4401522 (1983-08-01), Buschow et al.
patent: 4534843 (1985-08-01), Hirbour et al.
patent: 4540088 (1985-09-01), Bergh
patent: 4650264 (1987-03-01), Dahnert
patent: 4775046 (1988-10-01), Gramarossa et al.
patent: 4927438 (1990-05-01), Mears et al.
patent: 5048164 (1991-09-01), Harima
patent: 5110249 (1992-05-01), Norman
patent: 5261935 (1993-11-01), Ishii et al.
patent: 5603777 (1997-02-01), Ohashi
patent: 5762544 (1998-06-01), Zuniga et al.
patent: 5827118 (1998-10-01), Johnson et al.
patent: 5829939 (1998-11-01), Iwai et al.
patent: 5980183 (1999-11-01), Fosnight
patent: 6036426 (2000-03-01), Hillman
patent: 6054181 (2000-04-01), Nanbu et al.
patent: 6082949 (2000-07-01), Rosenquist
patent: 6183186 (2001-02-01), Howells et al.
patent: 6235634 (2001-05-01), Law et al.
patent: 6244812 (2001-06-01), Patterson et al.
patent: 6280134 (2001-08-01), Nering
patent: 6283692 (2001-09-01), Perlov et al.
patent: 6409448 (2002-06-01), Sindledecker
patent: 6439822 (2002-08-01), Kimura et al.
patent: 6579052 (2003-06-01), Bonora et al.
patent: 6955192 (2005-10-01), Matsui et al.
patent: 2002/0090282 (2002-07-01), Bachrach
patent: 2003/0010449 (2003-01-01), Gramarossa et al.
patent: 0 277 536 (1988-08-01), None
patent: 0 582 019 (1994-02-01), None
patent: 0219826 (1994-09-01), None
patent: 0472536 (1994-12-01), None
patent: 0651429 (1995-05-01), None
patent: 0556193 (1995-12-01), None
patent: 0663686 (1997-06-01), None
patent: 0684631 (1998-04-01), None
patent: 0555891 (1999-01-01), None
patent: 0 987 750 (2000-03-01), None
patent: 1 134 641 (2001-09-01), None
patent: 08046005 (1996-02-01), None
patent: 10-256346 (1998-09-01), None
patent: WO 97/03001 (1997-01-01), None
patent: WO 98/50946 (1998-11-01), None
patent: WO 99/28952 (1999-06-01), None
patent: WO 99/57940 (1999-11-01), None
patent: WO 99/64207 (1999-12-01), None
patent: WO 00/19493 (2000-04-01), None
patent: WO 00/44653 (2000-08-01), None
patent: WO 00/59004 (2000-10-01), None
patent: WO 01/01828 (2001-01-01), None
patent: WO 01/10756 (2001-02-01), None
patent: WO 02/04774 (2002-01-01), None
patent: WO 02/19392 (2002-03-01), None
Kobayashi, et al., “Particle Characteristics of 300-mm Minienvironment (FOUP and LPU)”, 1999, Proceedings of 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, pp. 39-42.
No-Author, “300mm Single-Wafer Handling” (Brief Article), Apr. 1, 2000, Solid State Technology, vol. 43, No. 4, p. 99.

Affiliated with

Also associated with

Rating

Substrate carrier having door latching and substrate... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate carrier having door latching and substrate..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate carrier having door latching and substrate... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3855301