Substrate carrier handler that unloads substrate carriers...

Details Substrate carrier handler that unloads substrate carriers... Substrate carrier handler that unloads substrate carriers...

2006-10-31

2008-03-18

Black, Thomas (Department: 3661)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C414S217000, C414S219000, C414S249000, C451S005000

Reexamination Certificate

active

07346431

ABSTRACT:
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

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