Substrate carrier for a vacuum coating apparatus

Details Substrate carrier for a vacuum coating apparatus Substrate carrier for a vacuum coating apparatus

1997-05-12

2000-07-04

Beck, Shrive

Coating apparatus

Gas or vapor deposition

Work support

118728, 118729, C23C 1600

Patent

active

060822988

ABSTRACT:
A vacuum coating apparatus includes a carrier accommodating substrates to be coated; and an evaporation source vertically spaced from the carrier and emitting a vapor stream onto the substrates mounted on the carrier. The carrier includes at least two radially adjoining segments each accommodating at least one substrate to be coated and a hinge interconnecting adjoining segments for allowing a tilting motion of the segments to either side relative to one another up to a predetermined angle.

REFERENCES:
patent: 3799110 (1974-03-01), Bellmann
patent: 3859956 (1975-01-01), Paola
patent: 4817559 (1989-04-01), Ciparisso
patent: 5124019 (1992-06-01), Kunkel et al.
patent: 5138974 (1992-08-01), Ciparisso
patent: 5382345 (1995-01-01), Huang et al.

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