4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Rudolf Suter

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Procedure and device for calibrating the gas pressure in a...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Pressure
Reexamination Certificate

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Substrate carrier for a vacuum coating apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-1489413

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