Substrate alignment system

Details Substrate alignment system Substrate alignment system

2002-10-07

2009-08-11

Underwood, Donald (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C294S907000, C414S937000

Reexamination Certificate

active

07572092

ABSTRACT:
A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an outward direction. The sensing path does not intersect the substrate when the substrate is located on the end effector. The controller for moving the substrate transport apparatus moves the substrate transport apparatus, based at least partially upon input from the sensor, to position the end effector at a predetermined position relative to the substrate to pick up the substrate onto the end effector.

REFERENCES:
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patent: 6032083 (2000-02-01), Oosawa
patent: 6491491 (2002-12-01), Tsuneda et al.
CCD Laser Displacement Sensor, LK Series pp. 1-6, 1997.

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