Sublimation bed employing carrier gas guidance structures

Details Sublimation bed employing carrier gas guidance structures Sublimation bed employing carrier gas guidance structures

2006-10-17

2006-10-17

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C034S209000, C034S211000, C034S215000, C034S226000, C392S388000, C392S389000

Reexamination Certificate

active

07122085

ABSTRACT:
Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, a guidance structure is configured to facilitate the repeated saturation of the carrier gas with the solid source for a vapor reactant. Methods of saturating a carrier gas using guidance structures are also provided.

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