Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Having light transmissive window
Reexamination Certificate
2007-05-22
2007-05-22
Whitehead, Jr., Carl (Department: 2813)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Having light transmissive window
C438S455000
Reexamination Certificate
active
10968588
ABSTRACT:
A method for manufacturing optically-transparent lids includes etching sub-wavelength structures on a surface of a lid wafer. The structures may be arrayed in a hexagonally closed-packed pattern.
REFERENCES:
patent: 6014251 (2000-01-01), Rosenberg et al.
patent: 6195478 (2001-02-01), Fouquet
patent: 6363183 (2002-03-01), Koh
patent: 6707518 (2004-03-01), Cowan
patent: 6791757 (2004-09-01), Hobbs et al.
patent: 0951069 (1999-10-01), None
patent: 1286187 (2003-02-01), None
patent: 1286187 (2004-08-01), None
patent: WO99/50905 (1999-10-01), None
patent: WO 01/56921 (2001-08-01), None
PCT Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration mailed Sep. 1, 2004, re PCT/US 2004/012088 filed Apr. 19, 2004 (12 pages).
Nikolajeff, et al.,Fabrication and Simulation of Diffractive Optical Elements with Superimposed Antireflection Subwavelength Gratings, Applied Optics, vol. 39, No. 26, pp. 4842-4846, © 2000Optical Society of America.
Deng, et al.,Fabrication and Properties of Visible-Light Subwavelength Amorphous Silicon Transmission Gratings, J. Vac. Sci. Technol. B13(6), pp. 2879-2882, © 1995American Vacuum Society.
U.S. Appl. No. 60/143,284, filed Jul. 12, 1999, 25 pages.
U.S. Appl. No. 60/310,399, filed Aug. 6, 2001, 61 pages.
Gooch Roland W.
Meissner Edward G.
Schimert Thomas R.
Syllaios Athanasios J.
Dolan Jennifer M.
Jr. Carl Whitehead
L-3 Communications Corporation
O'Keefe, Egan, Peterman & Enders
LandOfFree
Sub-wavelength structures for reduction of reflective... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Sub-wavelength structures for reduction of reflective..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sub-wavelength structures for reduction of reflective... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3725004