Styrene/maleates terpolymers

Details Styrene/maleates terpolymers Styrene/maleates terpolymers

1990-12-20

1991-11-26

Schofer, Joseph L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430192, 430176, 430197, 430905, 526320, G03C 176, C08F21816

Patent

active

050681680

ABSTRACT:
Terpolymers of styrene, mono-iso-butyl maleate and mono-2-(n-butoxy)ethyl maleate wherein the ratio of styrene units to maleate units is in the range of about 1:1 to about 1.6:1 and the ratio of mono-iso-butyl maleate units to mono-2-(n-butoxy)ethyl maleate is in the range of about 3:2 to about 1:3. The terpolymers are useful as alkali soluble binders for photoresist compositions.

REFERENCES:
patent: 3288842 (1966-11-01), Verdol
patent: 3317483 (1967-05-01), Verdol
patent: 3342787 (1967-09-01), Muskat
patent: 3446783 (1969-05-01), Kay et al.
patent: 3563937 (1971-02-01), Nickerson
patent: 3887450 (1975-06-01), Gilano et al.
patent: 4511640 (1985-04-01), Liu
patent: 4539286 (1985-09-01), Lipson et al.
patent: 4659642 (1987-04-01), Platzer et al.

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