Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2008-05-20
2008-05-20
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C073S105000, C977S856000
Reexamination Certificate
active
11104876
ABSTRACT:
An improved method for rapidly and accurately modifying small structures, including structures on a micron or nanometer scale, suitable for the repair of defects in lithographic photo-masks and semiconductors on a nano-scopic level. Features or samples repaired may be conductive or non-conductive. A single instrument can be employed to both observe the surface of the mask or wafer, and to effectuate the repair of conductive and non-conductive features thereon. Using a Stylus-Nano-Profilometer probe, rapid lateral strokes across the sample surface in a definable pattern at known high applied pressure are used to effectuate defect repair. The tip of the probe can also be dithered rapidly in a pattern or used as to create a jackhammer effect to more effectively remove material from the sample surface.
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Kneedler Eric
Linder Robert
Berman Jack I.
Fei Company
Griner David
Scheinberg Michael O.
Scheinberg & Griner LLP
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