Static information storage and retrieval – Systems using particular element – Ferroelectric
Patent
1997-11-06
2000-10-03
Nelms, David
Static information storage and retrieval
Systems using particular element
Ferroelectric
36518526, G11C 1122
Patent
active
061282111
ABSTRACT:
A non-volatile ferroelectric memory device has been developed, in which the lead titanate (PbTiO.sub.3) thin film is deposited on a n/P.sup.+ Si substrate by rf magnetron sputtering as the gate oxide and Pt is embedded in the gate oxide as the floating gate. Additionally, associated with the rapid bulk channel structure with higher mobility, the developed memory device has the following features: (1) low write/erase voltage (.ltoreq.10 V); (2) fast access time (<160 ns); (3) easy to fabricate on VLSI memory device.
REFERENCES:
patent: 4163985 (1979-08-01), Schuermeyer et al.
patent: 5229309 (1993-07-01), Kato
patent: 5369296 (1994-11-01), Kato
Chen Fu-Yuan
Chen Jiann-Ruey
Fang Yean-Kuen
Le Thong
National Science Council
Nelms David
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