Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch
Reexamination Certificate
2007-09-07
2011-11-08
Smith, Zandra (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
With lattice constant mismatch
C257S098000, C257SE21090, C438S479000
Reexamination Certificate
active
08053810
ABSTRACT:
A semiconductor substrate containing a single crystalline group IV semiconductor is provided. A single crystalline lattice mismatched group IV semiconductor alloy layer is epitaxially grown on a portion of the semiconductor layer, while another portion of the semiconductor layer is masked. The composition of the lattice mismatched group IV semiconductor alloy layer is tuned to substantially match the lattice constant of a single crystalline compound semiconductor layer, which is subsequently epitaxially grown on the single crystalline lattice mismatched group IV semiconductor alloy layer. Thus, a structure having both the group IV semiconductor layer and the single crystalline compound semiconductor layer is provided on the same semiconductor substrate. Group IV semiconductor devices, such as silicon devices, and compound semiconductor devices, such as GaAs devices having a laser emitting capability, may be formed on the on the same lithographic level of the semiconductor substrate.
REFERENCES:
patent: 4711514 (1987-12-01), Tangonan et al.
patent: 5422205 (1995-06-01), Inoue et al.
patent: 5747860 (1998-05-01), Sugiyama et al.
patent: 6680495 (2004-01-01), Fitzergald
patent: 6963078 (2005-11-01), Chu
patent: 2005/0186749 (2005-08-01), Sato et al.
patent: 2007/0015344 (2007-01-01), Mears et al.
patent: 2007/0042572 (2007-02-01), Bauer
patent: 2007/0104410 (2007-05-01), Ahn et al.
patent: 2007/0181977 (2007-08-01), Lochtefeld et al.
patent: 2008/0272391 (2008-11-01), Kapur et al.
U.S. Office Action dated Dec. 29, 2010.
U.S. Office Action dated Aug. 20, 2010.
Notice of Allowance dated Mar. 28, 2011.
Barwicz Tymon
Sadana Devendra K.
Alexanian Vazken
International Business Machines - Corporation
Niesz Jamie C
Scully Scott Murphy & Presser, PC
Smith Zandra
LandOfFree
Structures having lattice-mismatched single-crystalline... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Structures having lattice-mismatched single-crystalline..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Structures having lattice-mismatched single-crystalline... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4260149