Structured anode X-ray source for X-ray microscopy

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis

Reexamination Certificate

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C378S156000

Reexamination Certificate

active

07443953

ABSTRACT:
An x-ray source comprises a structured anode that has a thin top layer made of the desired target material and a thick bottom layer made of low atomic number and low density materials with good thermal properties. In one example, the anode comprises a layer of copper with an optimal thickness deposited on a layer of beryllium or diamond substrate. This structured target design allows for the use of efficient high energy electrons for generation of characteristic x-rays per unit energy deposited in the top layer and the use of the bottom layer as a thermal sink. This anode design can be applied to substantially increase the brightness of stationary, rotating anode or other electron bombardment-based sources where brightness is defined as number of x-rays per unit area and unit solid angle emitted by a source and is a key figure of merit parameter for a source.

REFERENCES:
patent: 7180981 (2007-02-01), Wang
patent: 2001/0046276 (2001-11-01), Schneider et al.
patent: 2003/0086533 (2003-05-01), Janik et al.
Gstir, B., et al., “Calculated cross sections for the K-shell ionization of chromium, nickel, copper, scandium and vanadium using the DM formalism,” Jour. Phys. B: At. Mol. Opt. Phys., 34, 3372-3382, 2001.
Goldstein, J. I., et al., Scanning Electron Microscopy and X-Ray Microanalysis, Plenum Press, New York, Chapter 3, 1992, nb pp. 76-78, 118-130, and 127-129.

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