Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2011-03-01
2011-03-01
Dinh, Paul (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000
Reexamination Certificate
active
07900164
ABSTRACT:
A structure for measuring both interconnect resistance and capacitance. The structure comprises a plurality of metallic interconnects, a first circuit for measuring capacitance charging current at a first interconnect and a second circuit for measuring the voltage drop between two positions at a second interconnect. The first circuit includes two electrically connected pseudo-inverters. Two control signals are fed into the two pseudo-inverters such that their associated capacitances are charged and discharged periodically. The first interconnect capacitance is determined by measuring the difference of charging currents between the two pseudo-inverters. A constant current flows through the second circuit and the interconnect resistance is determined by the voltage drop and the constant current.
REFERENCES:
patent: 6499129 (2002-12-01), Srinivasan et al.
patent: 6763504 (2004-07-01), Rao et al.
patent: 2004/0139406 (2004-07-01), Kasapi
Chen Shuxian
Watt Jeffrey T.
Alters Corporation
Dinh Paul
Morgan & Lewis & Bockius, LLP
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