Structure of radio frequency variable capacitor and method...

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

Reexamination Certificate

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C361S303000, C257S312000

Reexamination Certificate

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06865067

ABSTRACT:
In a structure of a radio frequency (RF) variable capacitor having a variable range of capacitance between a first minimum value and a first maximum value, and a method of manufacturing the structure, the structure includes a first capacitor, which has a variable range of capacitance between a second minimum value greater than the first minimum value and a second maximum value greater than the first maximum value, and a second capacitor, which is connected in series to the first capacitor and has a capacitance of a fixed value. By the structure and method, a quality factor of a radio frequency (RF) variable capacitor may be increased without adding complex processing steps.

REFERENCES:
patent: 4003009 (1977-01-01), Watanabe
patent: 4186350 (1980-01-01), Takayama
patent: 4769605 (1988-09-01), Fox
patent: 6278871 (2001-08-01), Jovenin
patent: 6355534 (2002-03-01), Cheng et al.
patent: 0 975 093 (2000-01-01), None
Zurcher, et al, “Integration of Thin Film MIM Capacitors . . . ” IEDM Tech.Digest p. 153-6 (Dec. 10, 2000).

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