4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Physical configuration of semiconductor
  6. Groove

Analog Devices IMI, Inc.

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Low-resistivity microelectromechanical structures with...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Micro-machined accelerometer with improved transfer...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microfabricated structures with electrical isolation and...

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – Groove
Reexamination Certificate

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Microfabricated structures with trench-isolation using...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Microfabrication using germanium-based release masks

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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