Strongly textured atomic ridges and tip arrays

Details Strongly textured atomic ridges and tip arrays Strongly textured atomic ridges and tip arrays

2000-09-08

2002-10-15

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Reexamination Certificate

active

06465782

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to movable multi-tip arrays.
2. Description of the Prior Art
Currently available movable multi-tip arrays include Ultrasharp calibration gratings having tip sizes of 10 nm and tip spacings of 1 to 10 &mgr;m. While such multi-tip arrays may be useful for purposes such as calibration gratings, if multi-tip arrays could be made having tips sizes and spacings 100 to 10,000 times smaller, such multi-tip arrays could be used for many more applications such as for use in lithography processes, chemical sensors, nano-circuits, DNA manipulation, and much more.
SUMMARY OF THE INVENTION
According to first broad aspect of the present invention, th ere is provided a multi-tip array device comprising: a substrate; a multi-tip array of atomic tips on the substrate, the multi-tip array having a pitch of 0.94 to 5.4 nm between adjacent tips in at least one direction; and means for moving the substrate.
According to a second broad aspect of the present invention, there is provided an atomic claw comprising: a mounting block; a paddle having a multi-tip array thereon, the multi-tip array having a pitch of 0.94 to 5.35 nm between adjacent tips in at least one direction; and a cantilever connected to the paddle and the mounting block, wherein the cantilever allows the paddle to be moved in at least one arcuate direction.
Other objects and features of the present invention will be apparent from the following detailed description of the preferred embodiment.


REFERENCES:
patent: 4983540 (1991-01-01), Yamaguchi et al.
patent: 4987094 (1991-01-01), Colas et al.
patent: 5053995 (1991-10-01), Kajimura et al.
patent: 5258326 (1993-11-01), Morishima et al.
patent: 5296719 (1994-03-01), Hirai et al.
patent: 5300452 (1994-04-01), Chang et al.
patent: 5327675 (1994-07-01), Butler et al.
patent: 5360978 (1994-11-01), Gueret
patent: 5372675 (1994-12-01), Wakabayashi et al.
patent: 5482890 (1996-01-01), Lin et al.
patent: 5567954 (1996-10-01), Dobson et al.
patent: 5612255 (1997-03-01), Chapple-Sokol et al.
patent: 6066265 (2000-05-01), Galvin et al.
patent: 6100524 (2000-08-01), Yagi et al.
Baski et al. A Stable High-Index Surface of Silicon, Si (5 5 12), Science, vol. 269, Issue 5230 Sep. 15, 1995, Pp 1556-1560.*
Erwin et al. Structure and Stability of Si (1 1 14)-(2×1), Physical Review Letters, vol. 77 No. 4 22 Jul. 1996, pp 687-690.*
Jones et al. Noble Metal Growth on Si (5 5 12) Submitted to World Scientific on Feb. 24, 2000.*
Baski et al, STM Studies of 1-D Noble Metals Growth on Silicon, Submitted to Ultramicroscopic (Heidelberg 200) on Jul. 3, 2000.*
Kendall, Don L., “Far Beyond Microelectronics with Silicon (Top Ten Speculations from Bulk Micromachining).”.

Affiliated with

Also associated with

Rating

Strongly textured atomic ridges and tip arrays does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Strongly textured atomic ridges and tip arrays, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Strongly textured atomic ridges and tip arrays will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2989987