Stroboscopic scanning electron microscope

Details Stroboscopic scanning electron microscope Stroboscopic scanning electron microscope

1983-02-28

1985-08-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 2300

Patent

active

045380651

ABSTRACT:
A synchronizing signal from a tester which also supplies a test signal to an object to be measured is supplied to a programmable counter. An output from the programmable counter is supplied to a D/A converter which then produces an X-axis scanning control signal S.sub.X. The output from the programmable counter is frequency-divided by a frequency divider. A frequency-divided signal is then supplied to a D/A converter which produces a Y-axis scanning control signal S.sub.Y. An image memory is arranged to store data of the number of secondary electrons and to supply this data to a CRT display unit. A cursor is moved to specify a measuring position under the control of a controller.

REFERENCES:
patent: 3535516 (1970-10-01), Munakata
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum et al.
patent: 4413181 (1983-11-01), Feuerbaum et al.

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