Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-08-19
1988-07-05
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 324 73R, 250310, 250311, G01N 2300
Patent
active
047557494
ABSTRACT:
A strobo electron beam apparatus is provided having an energy analyzer, which: measures the voltage in the integrated circuit; samples a secondary electron signal by setting and connecting a retarding voltage of the energy analyzer to the measured phase; obtains the waveform of the secondary electron signal by a one time or several times phase scanning; and adds the product of a suitable coefficient and a difference between the secondary electron signal waveform, and a slice level to the retarding voltage and corrects the same. Multiple units are provided for: judging the conversion of the retarding voltage, from the value of the dispersion for the slice level of the secondary electron signal waveform; for adding and giving a mean of the retarding voltage, for obtaining a measured value of retarding voltage having a desired S/N ratio; and for random phase scanning so that the measured value having a desired S/N ratio can be easily obtained.
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Goto Yoshiro
Ishizuka Toshihiro
Ito Akio
Ookubo Kazuo
Ozaki Kazuyuki
Eisenzopf Reinhard J.
Fujitsu Limited
Nguyen Vinh P.
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