Stress measuring method and system

Details Stress measuring method and system Stress measuring method and system

2008-03-11

2008-03-11

Berman, Jack I. (Department: 2809)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S311000, C250S306000, C250S307000, C250S310000

Reexamination Certificate

active

11349131

ABSTRACT:
A convergent electron beam is incident on an evaluation region of a crystalline material to obtain a HOLZ pattern formed by the convergent electron beam transmitted to the crystalline material (Steps S11to S13), a split width of the HOLZ line of the obtained HOLZ pattern is computed (Step S14), and a stress in the evaluation region of the crystalline material is evaluated based on the split width of the HOLZ line (Step S15). Thus, the stress measuring method and system can measure with good precision a local lattice strain amount and stress value of the crystalline material, and a stress value of a stress source applying a stress to the crystalline material.

REFERENCES:
patent: 6750451 (2004-06-01), Koguchi et al.
patent: 6844551 (2005-01-01), Takeno
patent: 2005/0061974 (2005-03-01), Kim et al.
patent: 6-36729 (1994-02-01), None
patent: 7-169811 (1995-07-01), None
patent: 2000-9664 (2000-01-01), None
patent: 2004-77247 (2004-03-01), None

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