Optics: measuring and testing – Of light reflection
Patent
1979-06-18
1981-05-26
Corbin, John K.
Optics: measuring and testing
Of light reflection
350276SL, 356342, G01N 2101, G02B 2714
Patent
active
042695180
ABSTRACT:
Stray scattering in a scatterometer is removed by use of a lens and aperture system in conjunction with a beamsplitter. Backscattered light from a mirror being tested is deflected by a beamsplitter and focused by a lens through an aperture onto a detector. The distance from the beamsplitter to the lens is much smaller than the distance from the mirror to the beamsplitter in order to increase the detected signal as compared with detected noise caused by light scattered by the beamsplitter. The scatterometer system disclosed is further refined by use of a cavity dumper which absorbs stray light left after reflection from the mirror being tested. The cavity dumper is a silicon semiconductor on a metal backing which absorbs the light with minimum reflection back along the original incident light path.
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Arnold Bruce Y.
Corbin John K.
Pritchard Kenneth G.
Sciascia R. S.
Skeer W. Thom
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