Stored energy arc detection and arc reduction circuit

Details Stored energy arc detection and arc reduction circuit Stored energy arc detection and arc reduction circuit

2005-04-05

2005-04-05

Le, N. (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

C204S298080, C204S192120

Reexamination Certificate

active

06876205

ABSTRACT:
This invention teaches an arc detection and arc reduction circuit for use with power supplies for delivering power to a plasma processing system that utilizes a resonant circuit that stores energy and when the voltage drops between the cathode and anode of the processing chamber the stored energy generates a current in a current transformer in response to the voltage change to switch a magnetically coupled inductor in parallel with the cathode and anode causing a reversal of the voltage that reduces arcs in the plasma chamber. In an alternate embodiment the magnetically coupled inductor is replaced by a pulse transformer and the pulse transformer is placed in parallel with the cathode and anode causing a reversal of the voltage that reduces arcs in the plasma chamber.

REFERENCES:
patent: 5415757 (1995-05-01), Szcyrbowski et al.
patent: 5584974 (1996-12-01), Sellers
patent: 5815388 (1998-09-01), Manley et al.

Affiliated with

Also associated with

Rating

Stored energy arc detection and arc reduction circuit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stored energy arc detection and arc reduction circuit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stored energy arc detection and arc reduction circuit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3403684