STM probe

Details STM probe STM probe

1994-08-24

1995-12-26

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 3700

Patent

active

054790131

ABSTRACT:
STM probe, in particular for use in an SEM for examining a surface of a sle by STM and/or SEM operation, comprising an outer and an inner piezotube; an object carrier plate mounted on the annular top face of the inner piezotube; a triangular head plate mounted on the annular top face of the outer piezotube and having a recess substantially concentric with the tubes in the triangle side crossing the tubes, the object carrier plate being arranged in this recess with play on all sides; a triangular test-prod attachment plate arranged at a space above the head plate and having a test-prod attachment made of an insulating material in the triangle side passing above the object carrier plate, for receiving a test prod; the corner areas of the plates being provided with fine-thread spindles for setting the space between the plates; and the two plates being held together by means of three springs engaging the corners.

REFERENCES:
patent: 4841148 (1989-06-01), Lyding
patent: 5103094 (1992-04-01), Hayes et al.
patent: 5173605 (1992-12-01), Hayes et al.
patent: 5306919 (1994-04-01), Elings et al.
patent: 5317153 (1994-05-01), Matsushiro et al.

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