Stirring apparatus for combinatorial processing

Details Stirring apparatus for combinatorial processing Stirring apparatus for combinatorial processing

2008-06-17

2011-11-15

Davis, Robert B (Department: 1743)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C118S313000, C205S126000, C366S196000, C366S315000, C366S317000, C366S343000, C427S437000

Reexamination Certificate

active

08058171

ABSTRACT:
An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.

REFERENCES:
patent: 6638564 (2003-10-01), Segawa et al.
patent: 2004/0137161 (2004-07-01), Segawa et al.
patent: 2007/0029189 (2007-02-01), Zach
patent: 2009/0155476 (2009-06-01), Francis et al.
patent: 2009/0155936 (2009-06-01), Weiner et al.
patent: 11246834 (1999-09-01), None
patent: 2001316834 (2001-11-01), None
Translation of JP 11-246980 dated Sep. 1999 obtained from the JPO website.

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