Bearings – Linear bearing – Ball bearing
Patent
1992-11-03
1994-05-24
Hannon, Thomas R.
Bearings
Linear bearing
Ball bearing
384 8, 384 10, 384 25, 384 54, F16C 2902, F16C 2912
Patent
active
053142543
ABSTRACT:
A stiffener assembly which provides for improved performance of a movable stage arrangement. Often, it is desired to provide a movable stage arrangement in which a stage moves linearly with respect to a stationary base. In many applications, it is necessary for the stage to move to successive rest positions, with movement of the stage inhibited at each of the reset positions. The stiffener of the present invention allows for controlled movement of a stage along its direction of travel, with the stiffener inhibiting undesired movement when the stage is at a rest position. In one form, a stiffener extends in the direction of travel of the stage, with one end of the stiffener assembly mounted to the stationary base, and the other end urged into frictional contact with the movable stage by a force applicator. As a result, the stiffener is placed in frictional contact with the movable stage. The coupling of the stage to the stiffener is insufficient to impede desired movement of the stage, however undesired movement at rest positions of the stage are avoided.
REFERENCES:
patent: 4529255 (1985-07-01), Piotrowski
patent: 4648725 (1987-03-01), Takahashi
patent: 4773770 (1988-09-01), Osawa et al.
patent: 4918846 (1990-04-01), Tsukada
patent: 4940339 (1990-07-01), Amano
Microelectronics Manufacturing Technology (pp. 60-64), May 1991. "Nanometer X-Y Positioning Stages for Scanning and Stepping", by Anwar Chitayat, Anorad Corporation, Hauppauge, N.Y.
Gurley John A.
Meyer Charles R.
Yashar Frank D.
Digital Instruments
Hannon Thomas R.
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