Electric resistance heating devices – Heating devices – Vaporizer
Patent
1995-06-05
2000-09-05
Paik, Sang
Electric resistance heating devices
Heating devices
Vaporizer
392403, A61H 3306, A61H 3312
Patent
active
061155381
ABSTRACT:
A steam supplying apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an on going ashing process. The closed vessel has a maximum horizontal cross sectional water evaporation area M and a minimum horizontal cross sectional water evaporation area S. The vessel is configured so that M/S<8, and the closed vessel has a submerged inside surface which is coated with a resin. The closed water-containing vessel is provided with a steam outlet connected thereto at a location above the surface of the water therein. The apparatus further includes a temperature-controlled liquid bath for the closed water-containing vessel and the vessel is at least partially submerged in the liquid bath.
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Fujimura Shuzo
Matoba Yuuji
Miyanaga Takeshi
Nakano Yoshimasa
Shinagawa Keisuke
Fujitsu Limited
Paik Sang
Shinko Seiki Co., Ltd.
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