Steam generator

Details Steam generator Steam generator

1989-10-11

1991-11-05

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

392394, F22B 128

Patent

active

050636090

ABSTRACT:
A steam generator has a plurality of vertically oriented boiling chambers. Feed water enters the top chamber and cascades down through drain tubes to the lower chambers. The bottom chamber has a drain to remove excess feed water. Each chamber has a feed water reservoir in which an electrical coil causes gentle boiling. The steam produced in each chamber is substantially free of droplets and is allowed to rise to the top chamber through steam passageways. A steam outlet in the top chamber allows the steam to be released for use in semiconductor wafer cleaning systems and other applications requiring pure steam. The steam generator may be formed by stacking modular units together.

REFERENCES:
patent: 2179781 (1939-11-01), Frankel
patent: 2336011 (1943-12-01), Haberstump
patent: 2391071 (1945-12-01), Price
patent: 2616023 (1952-10-01), Meyer
patent: 2627015 (1953-01-01), Hackman
patent: 3110797 (1963-11-01), Vanne
patent: 4186032 (1980-01-01), Ham
patent: 4266116 (1981-05-01), Bauer
patent: 4575613 (1986-03-01), Kunzli
patent: 4759315 (1988-07-01), Chiou et al.
patent: 4767502 (1988-08-01), Santasalo et al.

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