Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate
2005-02-22
2005-02-22
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
C700S059000
Reexamination Certificate
active
06859754
ABSTRACT:
A statistical process control (SPC) method, wherein a post-stage process corresponds to a pre-stage process, is disclosed in the present invention. In one embodiment, the SPC method comprises: collecting a plurality of pre-stage measurements and post-stage measurements respectively during the pre-stage process and the post-stage process; evaluating an equation for approaching a relation between the plurality of post-stage measurements and the plurality of pre-stage measurements; calculating based on the equation a post-stage variance being independent of the fluctuation of the plurality of pre-stage measurements; and monitoring the post-stage process of mass production by an upper and a lower control limits, wherein the upper control limit is equal to the equation plus half order of the post-stage variance and the lower control limit is equal to the equation minus half order of the post-stage variance.
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Hoff Marc S.
Miller Craig Steven
Mosel Vitelic Inc.
Townsend and Townsend / and Crew LLP
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