Static/dynamic multi-function measuring device for linear unit

Optics: measuring and testing – Position or displacement

Reexamination Certificate

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Details

C356S138000, C356S498000, C356S500000, C250S559290, C033S0010MP, C033S503000, C033S573000

Reexamination Certificate

active

07636170

ABSTRACT:
A static/dynamic multi-function measuring device for linear unit, includes a foundation, a multi-direction sliding unit having eddy current detector, a linear motor, a linear unit with a sensing element and an optical measuring unit; the static/dynamic multi-function measuring device uses the linear motor to drive the multi-direction sliding unit with low friction to provide a non-contact measurement of a parallel alignment of the linear unit, a linear accuracy measurement of the linear unit, and a vibration measurement of the linear unit to detect the parallel alignment of the linear unit and the linear accuracy of a slide rail and so on, the static/dynamic multi-function measuring device also measures errors of the linear unit and a slide block moving in the vibrating and the rolling direction.

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patent: 5839324 (1998-11-01), Hara
patent: 5925956 (1999-07-01), Ohzeki
patent: 6885435 (2005-04-01), Galburt
patent: 7388674 (2008-06-01), Yanaka et al.
patent: 7408650 (2008-08-01), Ueshima et al.
patent: 2004/0179192 (2004-09-01), Mizuno et al.

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