Standardized sample for characterizing the performance of a...

Details Standardized sample for characterizing the performance of a... Standardized sample for characterizing the performance of a...

2006-01-24

2006-01-24

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Standard

Surface standard

C356S243100

Reexamination Certificate

active

06989896

ABSTRACT:
A standardized sample for scatterometry includes four quadrants each including an inner block surrounded by four outer blocks. A pattern of gratings is repeated within each of the blocks using different resolutions and orientations. Each grating within an outer block has a matching grating within the block's pair. A grating and its matching grating are negative images of each other—the pitch and line-size of a grating are equal, respectively to the line size and pitch of the matching grating. The inner block also includes a series of background patterns positioned behind the gratings. These patterns include repeating patterns of hole and repeating line structures. This series of structures cover a large die area, helping to simulate the conditions faced by real-world scatterometers. The various structures feature a high-degree of alignment, allowing rapid verification using SEM or other techniques.

REFERENCES:
The Advanced Metrology Advisory Group (AMAG), “Reticle Design Description,” by Sematech International, Feb. 2000, 11 pages in length.

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