Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2011-01-25
2011-01-25
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000, C250S252100, C257S048000
Reexamination Certificate
active
07875850
ABSTRACT:
The invention provides a standard component for calibration that enables a calibration position to be easily specified in order to calibrate accurately a scale factor in the electron-beam system, and provides an electron-beam system using it. The standard component for calibration is one that calibrates a scale factor of an electron-beam system based on a signal of secondary charged particles detected by irradiation of a primary electron beam on a substrate having a cross section of a superlattice of a multi-layer structure in which different materials are deposited alternately. The substrate has linear patterns on the substrate surface parallel to the multi-layers and are arranged at a fixed interval in a direction crossing the cross section of the superlattice pattern, and the cross sections of the linear patterns are on substantially the same plane of the superlattice cross section, so that the linear patterns enable a position of the superlattice pattern to be identified.
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Ichiko Misumi et al., “Technical Study of Nanometric Lateral Scale Consisting of GaAs/InGaP Superlattice” Development of Nanometric Lateral Scales (Second Report), National Institute of Advanced Industrial Science and Technology, pp. 1091-1092, and 10 pages of English translation.
Hitomi Keiichiro
Nakayama Yoshinori
Sohda Yasunari
A. Marquez, Esq. Juan Carlos
Berman Jack I
Hitachi High-Technologies Corporation
Stites & Harbison PLLC
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