Stamper-forming electrode material, stamper-forming thin...

Details Stamper-forming electrode material, stamper-forming thin... Stamper-forming electrode material, stamper-forming thin...

2005-02-01

2005-02-01

Huff, Mark F. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S321000, C264S106000, C264S107000

Reexamination Certificate

active

06849390

ABSTRACT:
A stamper-forming electrode material contains Cu as its main ingredient and at least one other element, preferably Ag and/or Ti. It is preferred that the Ag content be 10.0 wt % or less and that the Ti content be 5.0 wt % or less. A stamper-forming thin film is made of this stamper-forming electrode material, whereby its corrosion resistance is improved to suppress damage to itself, and a high-quality stamper can hence be formed.

REFERENCES:
patent: 3553085 (1971-01-01), Heymann et al.
patent: 4661212 (1987-04-01), Ehrfeld et al.
patent: 5001035 (1991-03-01), van Liempd et al.
patent: 5073237 (1991-12-01), Bacher et al.
patent: 5776636 (1998-07-01), Kunisawa et al.
patent: 0 561 080 (1993-09-01), None

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