Stage-position measuring apparatus

Details Stage-position measuring apparatus Stage-position measuring apparatus

1994-07-26

1995-11-21

Limanek, Robert P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356400, 356357, 356345, 359859, G01B 902, G01B 1110, G01N 2186

Patent

active

054692601

ABSTRACT:
An apparatus for measuring the position of a movable stage by the use of a laser interferometer is of a construction in which covers are provided on respective ones of a beam optical path for reference travelling toward a fixed mirror in the laser interferometer and a beam optical path for measurement travelling toward a movable mirror and temperature-controlled gas is supplied into the covers.

REFERENCES:
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patent: 4643577 (1987-02-01), Roth et al.
patent: 4814625 (1989-03-01), Yabu
patent: 4958082 (1990-09-01), Makinouchi et al.
patent: 4984891 (1991-01-01), Miyazaki et al.
patent: 5141318 (1992-08-01), Miyazaki et al.
patent: 5151749 (1992-09-01), Tanimoto et al.
patent: 5151750 (1992-09-01), Magome et al.
patent: 5243195 (1993-09-01), Nishi

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